Time of Flight Backscatter and Secondary Ion Spectrometry in a Helium Ion Microscope
نویسندگان
چکیده
منابع مشابه
Secondary Electron Imaging in the Helium Ion Microscope
Secondary electrons (SE) have been for many years the most user friendly, versatile, and convenient modes of imaging in the scanning electron microscope. The Helium Ion Microscope (HIM) also generates secondary electrons (iSE) and potentially offers significant advantages compared to the conventional SEM including much enhanced spatial resolution and improved image contrast. There are, however,...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2018
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927618004506